Introduction to Focused Ion Beam (FIB) - H Zhou - MRL - 07302020

2020/07/31 に公開
視聴回数 17,546
0
0
This webinar gives a general introduction to focused ion beam (FIB) technique, which has drawn significant interest among the materials research community due to its unique capability of site-specific milling and depositing at nanometer or micrometer scale. Coupled with scanning electron microscopy (SEM) and equipped with a nano-manipulator and proper analytical detectors, FIB/SEM system can not only image and analyze sample cross-section or hidden features, but also generate a variety of 3 D structures, e.g., site-specific samples for transmission electron microscopy (TEM) and atom probe tomography (APT).